In this paper, for the first time, a unique pTFET-based biosensor device having channel epilayer has been introduced and its performance in the sensing domain has been studied in terms of five different sensitivity parameters. A rigorous analysis of the effect of the existent corner point (corner-effect) in the proposed device architecture on the sensitivity metrics has been performed for five different channel epilayer thicknesses, covering five different types of protein-molecules, viz., Apomyoglobin, Myoglobin, Protein-G, Ferricytochrome-C, and Ferrocytochrome-C. This is followed by determining detectability and optimum length-window of nanogap cavity of the proposed sensor device for the successful detection. Interestingly, it has been found that the undesired corner-effect, generally known for its unfavorable impact on the electrical behaviors of the MOS-based structures, actually comes to the aid by enhancing the detectability of the proposed device compared to its equivalent conventional SOI pTFET sensor device by almost 67% (for Protein-G, Ferricytochrome-C, and Ferrocytochrome-C) and 50% (for Apomyoglobin and Myoglobin) yet maintaining significantly good values for the sensitivity metrics throughout. Furthermore, smaller epilayer thicknesses ensure smaller optimum length-window of the nanogap cavity, resulting in more scaled-down device, compared to larger epilayer thickness values. A position-dependent variability study for the detectability also follows, and it has been found that for small epilayer thicknesses this dependency becomes large leading to less stable device, although, at the same time producing higher sensitivity metrics compared to the devices having large epilayer thicknesses. This makes the choice of channel epilayer thickness as application-specific.

中文翻译：

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角效应和沟道外延层厚度对独特的基于 pTFET 的生物传感器 (epiCOR-pTFET-生物传感器) 器件在低于 100 nm 栅极长度的性能的作用

在本文中，首次引入了一种独特的基于 pTFET 的具有通道外延层的生物传感器器件，并根据五个不同的灵敏度参数研究了其在传感领域的性能。已针对五种不同的通道外延层厚度对所提出的器件架构中现有角点（角效应）对灵敏度指标的影响进行了严格分析，涵盖了五种不同类型的蛋白质分子，即无肌红蛋白、肌红蛋白、蛋白质-G、铁细胞色素-C和铁细胞色素-C。接下来是确定所提出的传感器装置的纳米间隙腔的可检测性和最佳长度窗口，以便成功检测。有趣的是，已经发现不需要的角效应，通常以其对基于 MOS 结构的电行为的不利影响而闻名，实际上通过与等效的传统 SOI pTFET 传感器器件相比将所提议器件的可检测性提高了近 67%（对于 Protein-G、Ferricytochrome -C，和铁细胞色素-C）和 50%（对于无肌红蛋白和肌红蛋白），但始终保持灵敏度指标的显着良好值。此外，与较大的外延层厚度值相比，较小的外延层厚度可确保纳米间隙腔的最佳长度窗口较小，从而导致器件尺寸更小。检测能力的位置相关变异性研究也随之而来，并且已经发现，对于小外延层厚度，这种依赖性变大导致器件稳定性较差，尽管，与具有大外延层厚度的器件相比，同时产生更高的灵敏度指标。这使得通道外延层厚度的选择因应用而异。