This work presents the development of a porous silicon-based capacitive sensor for the time-effective and low-cost detection and quantification of organic solvents. The prototype chip was fabricated using a mechanized pulse fiber laser etching process in order to develop a single-layer silicon substrate with uniform porous structures. This enables a consistent surface area for sample distribution inside the pores and provides highly repeatable results essential for silicon-based sensor chip development. The fabricated chip was characterized using a scanning electron microscope, and it shows an average pore diameter of 55.22 μm and pore depth of 98.9 μm. The proposed sensor exhibits stable results up to 35 days at room temperature, and this demonstrates its superior performance over other porous silicon-based optical sensor chips. The application of the proposed sensor chip has been shown for sensing and quantification of the Atrazine chemical, which is a pesticide solvent utilized in farming to control weeds. The sensitivity and the limit of detection were found to be 0.51 nF/ppm and 0.929 ppm, respectively.

这项工作提出了一种多孔硅基电容传感器的开发，用于有机溶剂的时间有效和低成本检测和量化。原型芯片是使用机械化脉冲光纤激光蚀刻工艺制造的，以开发具有均匀多孔结构的单层硅基板。这使得孔内样品分布的表面积保持一致，并提供高度可重复的结果，这对于硅基传感器芯片的开发至关重要。使用扫描电子显微镜对制备的芯片进行表征，平均孔径为 55.22 μm，孔深为 98.9 μm。所提出的传感器在室温下表现出长达 35 天的稳定结果，这证明了其优于其他多孔硅基光学传感器芯片的性能。所提出的传感器芯片的应用已被证明可用于检测和量化阿特拉津化学品，这是一种用于农业控制杂草的农药溶剂。发现灵敏度和检测限分别为 0.51 nF/ppm 和 0.929 ppm。