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A Comprehensive Circuit Modeling Approach for Self-Sustained Capacitively Coupled Microwave Plasmas
IEEE Transactions on Plasma Science ( IF 1.5 ) Pub Date : 2021-08-26 , DOI: 10.1109/tps.2021.3105642
Sandeep Narasapura Ramesh , Abbas Semnani

A circuit modeling approach for self-sustained capacitively coupled microwave plasmas is introduced and validated in this article. The model solves the particle balance equation using a novel circuit optimization scheme to calculate the plasma parameters like electron density, sheath thickness, and electron temperature for a given input power, operating frequency, gas type, and pressure. While the existing models capture the ohmic loss in the bulk plasma region, the proposed model also takes into account power required to sustain plasma which proves to be considerable for higher electron densities. The model is rigorously validated using experimental results from two cases—one resonant and one non-resonant—both with self-sustained microwave plasma. As the post-processing results, other discharge parameters like sheath and plasma voltages as well as plasma reduced field are calculated. The proposed modeling approach can substantially simplify design and analysis of capacitively coupled microwave plasmas.

中文翻译:

自持电容耦合微波等离子体的综合电路建模方法

本文介绍并验证了一种用于自持电容耦合微波等离子体的电路建模方法。该模型使用新颖的电路优化方案求解粒子平衡方程,以针对给定的输入功率、工作频率、气体类型和压力计算等离子体参数,如电子密度、鞘层厚度和电子温度。虽然现有模型捕获了体等离子体区域中的欧姆损耗,但所提出的模型还考虑了维持等离子体所需的功率,这对于更高的电子密度来说是相当可观的。该模型使用两种情况的实验结果进行了严格验证——一种是共振的,一种是非共振的——两者都使用自持微波等离子体。作为后处理结果,计算其他放电参数,如鞘层和等离子体电压以及等离子体衰减场。所提出的建模方法可以大大简化电容耦合微波等离子体的设计和分析。
更新日期:2021-09-17
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