LC resonant wireless passive pressure sensor has been receiving increased attention nowadays. In this paper, an innovative LC-C resonant wireless passive pressure sensor based on dual capacitors was designed and manufactured to replace the traditional LC device. In addition to the inductor and capacitor structure required by the traditional LC device, this paper innovatively designs the fixed capacitor as the inter-layer interconnection structure. The key structural dimensions of the sensor were determined through the numerical analysis of the planar inductor theory and the electromechanical coupling simulation of the dual capacitors model in the previous stage, and the processing of the sensor was carried out through MEMS technology. The final test results showed that within the pressure range of 5kPa to 100kPa, the sensor’s average sensitivity was greater than 69.0 kHz/kPa, while the maximum linear fitting error was smaller than 4.18%. The temperature drift in atmospheric environment was 2.7kHz/°C, and the sensitivity temperature drift was 0.0062kHz/(kPa·°C).

中文翻译：

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基于电容馈通的创新 LC-C 谐振压力传感器

LC谐振无线无源压力传感器如今越来越受到关注。在本文中，设计并制造了一种基于双电容器的创新 LC-C 谐振无线无源压力传感器，以取代传统的 LC 器件。除了传统LC器件所需的电感电容结构外，本文创新性地设计了固定电容作为层间互连结构。通过前阶段平面电感理论的数值分析和双电容模型的机电耦合仿真，确定了传感器的关键结构尺寸，并通过MEMS技术进行了传感器的加工。最终测试结果表明，在 5kPa 到 100kPa 的压力范围内，传感器平均灵敏度大于69.0 kHz/kPa，最大线性拟合误差小于4.18%。大气环境温漂为2.7kHz/°C，灵敏度温漂为0.0062kHz/(kPa·°C)。