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In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer
IEEE Sensors Journal ( IF 4.3 ) Pub Date : 2021-07-21 , DOI: 10.1109/jsen.2021.3098797 Dandan Liu , Wenjie Wu , Shitao Yan , Qiangwei Xu , Yuanlei Wang , Huafeng Liu , Jinquan Liu , Ji Fan , Liangcheng Tu
IEEE Sensors Journal ( IF 4.3 ) Pub Date : 2021-07-21 , DOI: 10.1109/jsen.2021.3098797 Dandan Liu , Wenjie Wu , Shitao Yan , Qiangwei Xu , Yuanlei Wang , Huafeng Liu , Jinquan Liu , Ji Fan , Liangcheng Tu
The reduction of temperature effect is vitally important for high precision sensors. This paper introduces the theoretical analysis and experimental verification of an in-situ compensation method on the temperature coefficient of the scale factor for a single-axis electromagnetic force-balance feedback MEMS accelerometer. A micro thermistor, fabricated together with the MEMS accelerometer, is integrated to in-situ sense the temperature variation of the accelerometer. The thermistor is connected to the voltage-to-current resistance in series, which compensates the variation of the scale factor of the accelerometer that is influenced by temperature variation. The experimental results reveal that the temperature coefficient of the scale factor of the compensated accelerometer is within 6 ppm/°C for the temperature range from 25°C to 50°C, which is reduced by 68 times compared with the uncompensated accelerometer. Benefiting from the compatible fabrication process and the in-situ compensation, the proposed method is promising to be low-cost and high-efficiency.
中文翻译:
单轴Nano-g力平衡MEMS加速度计比例因子温度系数的原位补偿
降低温度效应对于高精度传感器至关重要。介绍了一种单轴电磁力平衡反馈MEMS加速度计比例因子温度系数原位补偿方法的理论分析和实验验证。与 MEMS 加速度计一起制造的微型热敏电阻集成在一起,以原位感应加速度计的温度变化。热敏电阻与电压-电流电阻串联,补偿温度变化影响的加速度计比例因子的变化。实验结果表明,补偿加速度计比例因子的温度系数在 25°C 到 50°C 的温度范围内在 6 ppm/°C 以内,与未补偿的加速度计相比,减少了 68 倍。受益于兼容的制造工艺和原位补偿,所提出的方法有望实现低成本和高效率。
更新日期:2021-09-17
中文翻译:
单轴Nano-g力平衡MEMS加速度计比例因子温度系数的原位补偿
降低温度效应对于高精度传感器至关重要。介绍了一种单轴电磁力平衡反馈MEMS加速度计比例因子温度系数原位补偿方法的理论分析和实验验证。与 MEMS 加速度计一起制造的微型热敏电阻集成在一起,以原位感应加速度计的温度变化。热敏电阻与电压-电流电阻串联,补偿温度变化影响的加速度计比例因子的变化。实验结果表明,补偿加速度计比例因子的温度系数在 25°C 到 50°C 的温度范围内在 6 ppm/°C 以内,与未补偿的加速度计相比,减少了 68 倍。受益于兼容的制造工艺和原位补偿,所提出的方法有望实现低成本和高效率。