A novel, miniaturized and easy-to-use optical sensor enabling accurate humidity measurement in real-time has been proposed in current study. This is achieved by the compact integration of a photonic chip with an artificial opal layer. The III-nitride chip with a size of 1 × 1 × 0.21 mm³ simultaneously provides two essential functions, i.e., photoemission and photodetection. The integrated opal film is comprised of silica powders with a hydrophilic nature, and its humidity-dependent light reflection can be precisely monitored by the on-chip detector without any aids of external optics. The optical sensing device shows a highly linear response in the relative humidity (RH) range of 3.8–90% and a sensitivity of 0.046–0.051 μA/%RH. The real-time monitoring function of the sensor has been demonstrated by mounting it on a facial mask which is used under various human breathing conditions. With the advantages of its compact size, ease of operation, high linearity and repeatability, large dynamic range, and fast response time, this cost-effective chip-scale optical sensor shows great potential in a wide range of practical humidity-sensing applications.

目前的研究提出了一种新型、小型化且易于使用的光学传感器，可实现实时准确的湿度测量。这是通过将光子芯片与人造蛋白石层紧密集成来实现的。尺寸为 1 × 1 × 0.21 mm ³的 III 族氮化物芯片同时提供两个基本功能，即光电发射和光电检测。集成的蛋白石薄膜由具有亲水性的二氧化硅粉末组成，其与湿度相关的光反射可由片上检测器精确监测，无需任何外部光学元件的帮助。光学传感装置在 3.8-90% 的相对湿度 (RH) 范围内表现出高度线性响应，灵敏度为 0.046-0.051 μA/%RH。该传感器的实时监测功能已通过将其安装在可在各种人类呼吸条件下使用的面罩上来证明。具有体积小、操作方便、线性度和重复性高、动态范围大、响应时间快等优点，