A lollipop-shaped cilia sensor based on the MEMS vector hydrophone was designed for measuring ocean turbulence. The micro-cross beam structure met successfully detected the ocean turbulence vector. In addition, the cilia were designed in a lollipop shape, which not only increased the turbulence signal receiving area but also achieved better diversion effects. In general, the turbulence signal is usually concentrated in the range 0–200 Hz. The sensor structure was simulated and analyzed and its size was optimized. The frequency response bandwidth was also ensured, leading to improved sensitivity. The results of sensor calibration experiments prove that the lollipop-type cilia sensor has high sensitivity, reaching 2.73×10⁻² Vms²/kg. In addition, the vector test results verify that the MEMS turbulence sensor accurately measured the two-dimensional ocean turbulence.

基于MEMS矢量水听器的棒棒糖形纤毛传感器被设计用于测量海洋湍流。遇到的微横梁结构成功检测到海洋湍流矢量。此外，纤毛被设计成棒棒糖形状，不仅增加了湍流信号接收面积，还取得了更好的导流效果。通常，湍流信号通常集中在 0-200 Hz 范围内。对传感器结构进行了仿真分析并优化了其尺寸。还确保了频率响应带宽，从而提高了灵敏度。传感器标定实验结果证明棒棒糖型纤毛传感器灵敏度高，达到2.73×10 ^-2 Vms ²/公斤。此外，矢量测试结果验证了MEMS湍流传感器准确测量二维海洋湍流。