For precise physical and chemical analyses of cells in microfluidic devices, they should be located near the sensors on a microchannel wall. To transport cells close to the sensors precisely, a hydraulic microactuator with a coarse/fine drive-switching mechanism was developed. The microactuator has a movable thin film with micropillars, and switches drive modes through the contacts of the micropillars into a microchannel wall. A coarse approach and a fine adjustment of the position of cells on the thin film toward the microchannel wall by switching the drive modes was achieved in the microactuator. The displacement of the microactuator was measured at 1 µm resolution using the focus degrees obtained using the two-dimensional fast Fourier transformed images. The displacement ratio of the coarse to fine drive mode achieved using the microactuator was 13.9. Using the microactuator, cyanobacteria were introduced into the device and were transported 53 µm from the bottom to the top of the microchannel in the coarse drive mode, and the position of the cyanobacteria was precisely adjusted near the microchannel wall in the fine drive mode.

为了对微流体装置中的细胞进行精确的物理和化学分析，它们应位于微通道壁上的传感器附近。为了精确地将细胞输送到传感器附近，开发了一种具有粗/精驱动切换机制的液压微致动器。微致动器具有带有微柱的可移动薄膜，并通过微柱的触点将驱动模式切换到微通道壁中。在微致动器中实现了通过切换驱动模式粗略调整薄膜上细胞朝向微通道壁的位置。使用二维快速傅立叶变换图像获得的聚焦度，以 1 µm 分辨率测量微致动器的位移。使用微致动器实现的粗与细驱动模式的位移比为 13.9。使用微驱动器，蓝藻被引入装置，并在粗驱动模式下从微通道底部传输到顶部 53 µm，在微驱动模式下，蓝藻的位置在微通道壁附近精确调整。