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Bioinspired Multifunctional Glass Surfaces through Regenerative Secondary Mask Lithography
Advanced Materials ( IF 29.4 ) Pub Date : 2021-09-13 , DOI: 10.1002/adma.202102175
Martyna Michalska 1 , Sophia K Laney 1 , Tao Li 1 , Mark Portnoi 1 , Nicola Mordan 2 , Elaine Allan 3 , Manish K Tiwari 4, 5 , Ivan P Parkin 6 , Ioannis Papakonstantinou 1
Affiliation  

Nature-inspired nanopatterning offers exciting multifunctionality spanning antireflectance and the ability to repel water/fog, oils, and bacteria; strongly dependent upon nanofeature size and morphology. However, such patterning in glass is notoriously difficult, paradoxically, due to the same outstanding chemical and thermal stability that make glass so attractive. Here, regenerative secondary mask lithography is introduced and exploited to enable customized glass nanopillars through dynamic nanoscale tunability of the side-wall profile and aspect ratio (>7). The method is simple and versatile, comprising just two steps. First, sub-wavelength scalable soft etch masks (55–350 nm) are generated through an example of block copolymer micelles or nanoimprinted photoresist. Second, their inherent durability problem is addressed by an innovative cyclic etching, when the original mask becomes embedded within a protective secondary organic mask, which is tuned and regenerated, permitting dynamic nanofeature profiling with etching selectivity >1:32. It is envisioned that such structuring in glass will facilitate fundamental studies and be useful for numerous practical applications—from displays to architectural windows. To showcase the potential, glass features are tailored to achieve excellent broadband omnidirectional antireflectivity, self-cleaning, and unique antibacterial activity toward Staphylococcus aureus.

中文翻译:

通过再生二次掩模光刻获得仿生多功能玻璃表面

受自然启发的纳米图案提供令人兴奋的多功能性,包括抗反射和排斥水/雾、油和细菌的能力;强烈依赖于纳米特征尺寸和形态。然而,众所周知,玻璃中的这种图案化是非常困难的,自相矛盾的是,由于玻璃具有同样出色的化学和热稳定性,这使得玻璃如此有吸引力。在这里,引入并利用再生二次掩模光刻技术通过侧壁轮廓和纵横比 (>7) 的动态纳米级可调性来实现定制的玻璃纳米柱。该方法简单且通用,仅包括两个步骤。首先,通过嵌段共聚物胶束或纳米压印光刻胶的示例生成亚波长可扩展软蚀刻掩模(55-350 nm)。第二,它们固有的耐用性问题通过创新的循环蚀刻得到解决,当原始掩模嵌入保护性二级有机掩模中时,该掩模被调整和再生,允许动态纳米特征分析,蚀刻选择性>1:32。可以设想,这种玻璃结构将有助于基础研究,并可用于许多实际应用——从显示器到建筑窗户。为了展示潜力,玻璃特性被定制以实现出色的宽带全向减反射、自清洁和独特的抗菌活性 可以设想,这种玻璃结构将有助于基础研究,并可用于许多实际应用——从显示器到建筑窗户。为了展示潜力,玻璃特性被定制以实现出色的宽带全向减反射、自清洁和独特的抗菌活性 可以设想,这种玻璃结构将有助于基础研究,并可用于许多实际应用——从显示器到建筑窗户。为了展示潜力,玻璃特性被定制以实现出色的宽带全向减反射、自清洁和独特的抗菌活性金黄色葡萄球菌
更新日期:2021-10-27
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