In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.

中文翻译：

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声敏立方碳化硅膜片的制作与压痕

在这项研究中，550 nm 厚的立方碳化硅方形隔膜从 Si 衬底上进行回蚀刻。然后，对具有不同尺寸、压痕位置和载荷的样品进行压痕。通过分析载荷-位移曲线记录了三个参数的影响。发现面积较大、边缘有凹痕且负载较低的隔膜表现出几乎弹性的行为。此外，两个样品爆裂，其中一个显示弹出行为，我们确定这是由于塑性变形造成的。根据最佳尺寸和负载，我们计算弹性隔膜的最大压力。该压力足以使立方碳化硅隔膜用作声学传感器来检测有毒气体。