Piezoelectric type vibration energy harvesters are prominently used due to their simple operation and compatibility with MEMS fabrication technology. Cantilever structures fixed from one end and free from the other are widely used to realize a Piezoelectric vibration energy harvester. In this paper, a fixed -fixed or guided beam type Piezoelectric Vibration Energy Harvester has been fabricated and tested for low-frequency operation. Device design and fabrication have been done ensuring low-frequency operation, stable and reliable device operation and higher potential generation. The device exhibits a sensitivity of 1.3925 mV/m/s² which can be combined in series or parallel to power a wireless sensor node.

压电式振动能量收集器因其操作简单且与 MEMS 制造技术兼容而被广泛使用。一端固定而另一端自由的悬臂结构被广泛用于实现压电振动能量收集器。在本文中，一个固定-固定或导向梁型压电振动能量收集器已经制造并测试用于低频操作。已完成器件设计和制造，确保低频运行、稳定可靠的器件运行和更高的电位产生。该器件具有 1.3925 mV/m/s ²的灵敏度，可以串联或并联组合为无线传感器节点供电。