In this paper, a facile method is demonstrated to fabricate high resolution silver nanowires (AgNWs) electrode by combining femtosecond laser patterning and oxygen plasma treatment. The laser precision cutting selectively removes the thin polydimethylsiloxane (PDMS) mask to expose the target PDMS substrate. The subsequent oxygen plasma treatment makes the target substrate hydrophilic. The resulting wetting/dewetting pattern allows for selective trapping of AgNWs solutions into the hydrophilic regions. The geometry of AgNWs electrode can be readily tuned by varying the cutting path of laser patterning mask. Improving the cutting accuracy of mask by adjusting laser processing parameters, the minimum width of the AgNWs electrode can be reduced to 50 µm. The prepared AgNWs electrodes show good conductivity even after tensile strain less than 20% or 5000 bending cycles at 4 mm bending radius. Furthermore, using the patterned AgNWs electrodes, flexible electroluminescent displays are constructed, which exhibit bright and uniform emission with clear edges; even the track width is only 50 µm. This method provides a novel approach to pattern complex electrode for the application of flexible electronic products.

中文翻译：

---

用于制造柔性银纳米线电极的飞秒激光图案化润湿性辅助 PDMS

在本文中，展示了一种通过结合飞秒激光图案化和氧等离子体处理来制造高分辨率银纳米线 (AgNWs) 电极的简便方法。激光精密切割有选择地去除薄聚二甲基硅氧烷 (PDMS) 掩模，以暴露目标 PDMS 基板。随后的氧等离子体处理使目标基板亲水。由此产生的润湿/去湿模式允许将 AgNWs 溶液选择性捕获到亲水区域中。通过改变激光图案掩模的切割路径，可以很容易地调整 AgNWs 电极的几何形状。通过调整激光加工参数提高掩模的切割精度，AgNWs电极的最小宽度可以减小到50μm。即使在拉伸应变小于 20% 或在 4 mm 弯曲半径下弯曲循环 5000 次后，制备的 AgNWs 电极仍显示出良好的导电性。此外，使用图案化的AgNWs电极，构建了柔性电致发光显示器，其发光均匀，边缘清晰；即使轨道宽度仅为 50 µm。该方法为柔性电子产品的应用提供了一种对复杂电极进行图案化的新方法。