The mode localization phenomenon is an effective technique to enhance sensor sensitivity, and some low noise floor mode-localized sensors, including accelerometers, mass sensors, and electrometers, have been successfully realized. To further improve the performance of the mode-localized accelerometer, we report a microelectromechanical system mode-localized accelerometer based on 4-degree of freedom (DoF) weakly coupled resonators (WCRs) with a stress-relief structure eliminating the thermal stress generated during the silicon-on-glass fabrication process. Experimental results show that compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.40 g⁻¹), the amplitude ratio-based sensitivity of the proposed accelerometer (119.36 V·g⁻¹) is improved by 2612%. Moreover, the noise floor is 0.64 µg·Hz^−1/2 from 0.01 to 3 Hz under the closed-loop circumstance. To the authors’ best knowledge, this is the lowest measured noise floor for mode-localized accelerometers.

模式定位现象是提高传感器灵敏度的有效技术，一些低噪声本底模式定位传感器，包括加速度计、质量传感器和静电计，已经成功实现。为了进一步提高模式局域加速度计的性能，我们报告了一种基于 4 自由度 (DoF) 弱耦合谐振器 (WCR) 的微机电系统模式局域加速度计，其应力消除结构消除了在运动过程中产生的热应力。玻璃上硅制造工艺。实验结果表明，与最先进的 3-DoF 模式定位加速度计 (4.40 g ^-1 ) 相比，所提出的加速度计的基于幅度比的灵敏度 (119.36 V·g ^-1) 提高了 2612%。此外，在闭环环境下，从 0.01 到 3 Hz ，本底噪声为 0.64 µg·Hz ^-1/2。据作者所知，这是模式定位加速度计的最低测得本底噪声。