A method of fabricating a micro-networked metal electrode using a self-cracking WO₃ oxide thin film as a sacrificial layer is presented. The width of the formed crack can be adjusted to a size of 10 to 40 µm by adjusting the wet-etching time in dilute NaOH solution, and accordingly, the electrical conductivity and transmittance of the electrode can be adjusted. An electrical conductivity of approximately 100 Ω/sq was measured at an average transmittance of 95.6% in the visible light region, and when applied to a flexible substrate, the electrical resistance was maintained stable even with repeated bending tests. The method proposed in this study can be applied to various transparent flexible electrode devices.

提出了一种使用自裂WO ₃氧化物薄膜作为牺牲层来制造微网状金属电极的方法。通过调节稀NaOH溶液中的湿蚀刻时间，可以将形成的裂纹宽度调节到10～40μm，从而调节电极的电导率和透光率。在可见光区域的平均透射率为 95.6% 时测得的电导率约为 100 Ω/sq，当应用于柔性基板时，即使重复弯曲试验，电阻也保持稳定。本研究提出的方法可应用于各种透明柔性电极装置。