Microdisk resonators offer a small mode volume and are therefore commonly investigated for their suitability as platforms for low-threshold lasing. In addition, the inherent strong confinement of light not only renders such structures promising candidates for efficient single-photon sources, but even motivates a key role for integrated photonic circuitry. Herein, ZnSe-based microdisks with ZnCdSe quantum well (QW) structures in ZnMgSe barriers are analyzed. In microphotoluminescence (μPL), stimulated emission into whispering gallery modes (WGMs) is demonstrated. Scanning electron microscopy (SEM) is used to determine the edge roughness of a multitude of resonators using a fitting routine, revealing a correlation between the edge roughness and overall optical quality of the resonators. These results are confirmed by calculations based on the boundary element method using the measured roughness as input parameter. To avoid the common problem of degradation under excitation in ZnSe-based structures, an alternative fabrication technique is introduced, which is new to this material system. It yields supported disks in direct contact with an Al₂O₃ layer on the substrate, which enhances the mechanical and thermal stability of the resonator. The occurrence of WGMs in supported ZnSe:Cl resonators is demonstrated in μPL experiments and confirmed by theoretical calculations.

中文翻译：

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独立式 ZnSe 基微盘谐振器：边缘粗糙度对光学质量的影响并通过支持几何减少退化

微盘谐振器提供小的模式体积，因此通常对其作为低阈值激光发射平台的适用性进行研究。此外，固有的强光限制不仅使这种结构成为高效单光子源的候选者，而且甚至激发了集成光子电路的关键作用。在此，分析了在 ZnMgSe 势垒中具有 ZnCdSe 量子阱 (QW) 结构的 ZnSe 基微盘。在微光致发光 (μPL) 中，演示了进入回音壁模式 (WGM) 的受激发射。扫描电子显微镜 (SEM) 用于使用拟合程序确定多个谐振器的边缘粗糙度，揭示边缘粗糙度与谐振器的整体光学质量之间的相关性。这些结果通过基于边界元方法的计算得到证实，使用测量的粗糙度作为输入参数。为了避免 ZnSe 基结构在激发下降解的常见问题，引入了一种替代制造技术，这对该材料系统来说是新的。它产生与铝直接接触的支撑盘₂ O ₃层位于衬底上，增强了谐振器的机械和热稳定性。在 μPL 实验中证明了支持的 ZnSe:Cl 谐振器中 WGM 的发生，并通过理论计算得到证实。