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Synthesis of indium tin oxide films from ethyl acetoacetonato complexes at low temperatures
Journal of Sol-Gel Science and Technology ( IF 2.5 ) Pub Date : 2021-09-08 , DOI: 10.1007/s10971-021-05618-7
Takahiro Gunji 1, 2 , Kotoe Nakamura 1 , Ryohei Hayami 1, 3 , Akihisa Aimi 1 , Kenjiro Fujimoto 1, 2 , Kazuki Yamamoto 1
Affiliation  

A novel recycling system for indium in indium tin oxide (ITO), which comprises the dissolution of indium oxide (In2O3), chlorination, chelation, and steaming treatment, was established. Indium trichloride (InCl3) was quantitatively synthesized by the reaction of In2O3 with hydrochloric acid (HCl) and furnished tris(ethyl acetoacetato)indium (In(etac)3) in a high yield by a subsequent reaction with ethyl acetoacetate (Hetac). In(etac)3 was mixed with bis(acetylacetonato)tin dichloride (Sn(acac)2Cl2) and spin coated on a glass plate, followed by steaming and heating to obtain ITO films containing 10 wt% tin oxide. In2O3 was crystallized in c-, rh-, and o-In2O3. This film showed a resistivity of 9.7 Ωcm and a transparency of 86%.



中文翻译:

乙酰丙酮乙酯配合物在低温下合成氧化铟锡薄膜

建立了氧化铟锡(In 2 O 3 )溶解、氯化、螯合、汽蒸处理的铟锡氧化物(ITO)回收新体系。通过 In 2 O 3与盐酸 (HCl)反应定量合成三氯化铟 (InCl 3 ),并通过随后与乙酰乙酸乙酯反应以高收率提供三(乙酰乙酸乙酯)铟 (In(etac) 3 ) (赫塔克)。In(etac) 3与双(乙酰丙酮)二氯化锡(Sn(acac) 2 Cl 2)并旋涂在玻璃板上,然后蒸和加热得到含有10wt%氧化锡的ITO薄膜。In 2 O 3在c-、rh-和o-In 2 O 3 中结晶。该膜显示出9.7Ωcm的电阻率和86%的透明度。

更新日期:2021-09-09
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