Quartz crystal microbalance (QCM) resonators are used in a wide range of sensors. Current QCM resonators achieve a simultaneous measurement of multiple physical quantities by analyzing lumped-element equivalent parameters, which are obtained via the introduction of external devices. This introduction of external devices will probably increase measurement error. To realize the measurement of multiple physical quantities while eliminating the measurement error caused by external devices, this paper proposes a measurement method for the lumped-element equivalent parameters of QCM resonators without the need for extra external devices. Accordingly, a numerical method for solving nonlinear equations with fewer data points required and a higher accuracy was adopted. A standard crystal resonator parameter extraction experiment is described. The extracted parameters were consistent with the nominal parameters, which confirms the accuracy of this method. Furthermore, six QCM resonator device samples with different electrode diameters and materials were produced and used in the parameter measurement experiment. The linear relationship between the electrode material conductivity and motional resistance R₁ is discussed. The ability of this method to characterize the electrode material and to detect the rust status of the electrode is also demonstrated. These abilities support the potential utility of the proposed method for an electrode quality assessment of piezoelectric devices.

中文翻译：

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QCM谐振器装置等效电路参数提取与电极质量评估方法

石英晶体微天平 (QCM) 谐振器广泛用于传感器。当前的 QCM 谐振器通过分析集总元件等效参数来实现对多个物理量的同时测量，这些参数是通过引入外部设备获得的。引入外部设备可能会增加测量误差。为了在消除外部设备引起的测量误差的同时实现多个物理量的测量，本文提出了一种无需额外外部设备的QCM谐振器集总元件等效参数的测量方法。因此，采用了一种求解非线性方程的数值方法，需要的数据点更少，精度更高。描述了标准晶体谐振器参数提取实验。提取的参数与标称参数一致，证实了该方法的准确性。此外，还制作了六个不同电极直径和材料的 QCM 谐振器器件样品，并将其用于参数测量实验。电极材料电导率与运动电阻的线性关系讨论了R ₁。还展示了该方法表征电极材料和检测电极生锈状态的能力。这些能力支持所提出的方法对压电设备的电极质量评估的潜在效用。