We report a versatile and simple approach to obtain nanotubes and nanorods in molybdenum oxide (MoO\(_3\)) thin films deposited by thermal evaporation, with subsequent post-deposition annealing at different temperatures. The X-ray diffraction patterns inferred a structural transition from amorphous to crystalline phase with annealing at 150 °C or higher temperature. The Fourier transform infrared spectra showed the characteristic vibrations of MoO\(_3\). The as-deposited amorphous MoO\(_3\) thin film transforms its morphology to nanotubes and then to nanorods with annealing, which may be ascribed to interface-assisted phenomena. A slight decrease of average transmittance in the Visible-NIR region is observed with increase in annealing temperature. The decrease in the optical band gap of annealed thin films anticipated the formation of oxygen vacancies. Thus, the structural, morphological, and optical properties of MoO\(_3\) thin films are found to be influenced by the annealing temperature. The thermally induced nanostructures in molybdenum oxide thin films can be utilized for sensing applications.

我们报告了一种通用且简单的方法来在通过热蒸发沉积的氧化钼 (MoO \(_3\) ) 薄膜中获得纳米管和纳米棒，随后在不同温度下进行沉积后退火。X 射线衍射图推断出在 150 °C 或更高温度下退火时从非晶相到结晶相的结构转变。傅里叶变换红外光谱显示了MoO \(_3\)的特征振动。沉积态的非晶 MoO \(_3\)薄膜将其形态转变为纳米管，然后通过退火转变为纳米棒，这可能归因于界面辅助现象。随着退火温度的升高，观察到可见光-近红外区域的平均透射率略有下降。退火薄膜光学带隙的减小预示着氧空位的形成。因此，发现MoO \(_3\)薄膜的结构、形态和光学性质受退火温度的影响。氧化钼薄膜中的热诱导纳米结构可用于传感应用。