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Ohmic and Schottky contacts of hydrogenated and oxygenated boron-doped single-crystal diamond with hill-like polycrystalline grainsProject supported by the Key-Area Research and Development Program of Guangdong Province (Grant No. 2020B0101690001) and the National Natural Science Foundation of China (NSFC) (Grant No. 51972135).
Chinese Physics B ( IF 1.7 ) Pub Date : 2021-09-03 , DOI: 10.1088/1674-1056/ac032b
Jing-Cheng Wang 1 , Hao Chen 1 , Lin-Feng Wan 1 , Cao-Yuan Mu 1 , Yao-Feng Liu 1 , Shao-Heng Cheng 1, 2 , Qi-Liang Wang 1, 2 , Liu-An Li 1 , Hong-Dong Li 1, 2
Affiliation  

Hill-like polycrystalline diamond grains (HPDGs) randomly emerged on a heavy boron-doped p+ single-crystal diamond (SCD) film by prolonging the growth duration of the chemical vapor deposition process. The Raman spectral results confirm that a relatively higher boron concentration (∼ 1.1 1021 cm−3) is detected on the HPDG with respect to the SCD region (∼ 5.4 1020 cm−3). It demonstrates that the Au/SCD interface can be modulated from ohmic to Schottky contact by varying the surface from hydrogen to oxygen termination. The current–voltage curve between two HPDGs is nearly linear with either oxygen or hydrogen termination, which means that the HPDGs provide a leakage path to form an ohmic contact. There are obvious rectification characteristics between oxygen-terminated HPDGs and SCD based on the difference in boron doping levels in those regions. The results reveal that the highly boron-doped HPDGs grown in SCD can be adopted as ohmic electrodes for Hall measurement and electronic devices.



中文翻译:

广东省重点领域研究发展计划(2020B0101690001)和国家自然科学基金(NSFC)资助的具有山丘状多晶的氢化和氧化硼掺杂单晶金刚石的欧姆和肖特基接触项目)(授权号 51972135)。

通过延长化学气相沉积过程的生长持续时间,山状多晶金刚石晶粒 (HPDG) 随机出现在重硼掺杂的 p +单晶金刚石 (SCD) 膜上。拉曼光谱的结果证实,相对较高的硼浓度(〜1.1 10 21厘米-3)是在检测到HPDG相对于所述SCD区域(〜5.4 10 20厘米-3)。它表明可以通过将表面从氢终止到氧终止来将 Au/SCD 界面从欧姆接触调制为肖特基接触。两个 HPDG 之间的电流-电压曲线与氧端或氢端几乎呈线性关系,这意味着 HPDG 提供了形成欧姆接触的泄漏路径。基于这些区域硼掺杂水平的差异,氧封端HPDG和SCD之间存在明显的整流特性。结果表明,在 SCD 中生长的高硼掺杂 HPDG 可用作霍尔测量和电子设备的欧姆电极。

更新日期:2021-09-03
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