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AP-PACVD plasma printer: investigating the influence of gas flow rates to printing resolution in parallel with CFD simulation
Journal of Physics D: Applied Physics ( IF 3.4 ) Pub Date : 2021-09-07 , DOI: 10.1088/1361-6463/ac2063
Kishor Acharya 1, 2 , Simon Bulou 1 , Thomas Gaulain 1 , Patrick Choquet 1
Affiliation  

A coaxial shaped atmospheric pressure plasma torch has been used to deposit the millimetric scale plasma polymer. A detailed experiment has revealed the appearance of three different kinetic regimes with distinct coating morphology: no deposition, circular dot and circular ring formation. The ratio of precursor carrier gas flow to the plasma species carrier gas flow has been identified as crucial factor to separate the three regimes. Further experiments regarding the influence of precursor mass fraction on the dimension and deposition rates has been performed for a circular dot regime to get more insights into the coating shape, size and volume and its relation to gas flow dynamics. A side by side computational fluid dynamic simulation coupled with species transport module has been performed to understand the influence of flow dynamics on coating morphology. The appearance of recirculatory vortices in-between the nozzle and substrate and its role on confinement of precursor at specific region and mixing of plasma species to precursor has been highlighted. A good correlation in between the diameter of thus coated plasma polymer in circular dot regime and the simulated confinement zone is here reported.



中文翻译:

AP-PACVD 等离子打印机:与 CFD 模拟并行研究气体流速对打印分辨率的影响

同轴形状的大气压等离子体炬已用于沉积毫米级等离子体聚合物。详细的实验揭示了具有不同涂层形态的三种不同动力学状态的出现:无沉积、圆点和圆环形成。前驱体载气流量与等离子体物质载气流量的比率已被确定为区分这三种状态的关键因素。关于前体质量分数对圆点体系尺寸和沉积速率影响的进一步实验已经进行,以更深入地了解涂层形状、尺寸和体积及其与气体流动动力学的关系。并排计算流体动力学模拟与物质传输模块相结合,以了解流动动力学对涂层形态的影响。喷嘴和基板之间的再循环涡流的出现及其在特定区域限制前体和等离子体物质与前体混合的作用已得到强调。此处报道了圆形点区域中如此涂覆的等离子体聚合物的直径与模拟限制区之间的良好相关性。

更新日期:2021-09-07
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