In this work, the chemical reaction of silane and ammonia gases was induced and assisted by electric power transferred to the reaction volume throughout argon discharge at pressures of about 3 mbar. This power was applied to the reaction volume as short pulses with different durations to produce highly-pure polycrystalline Si₃N₄ nanoparticles. The number of crystal planes was decreased by using shorter pulses of discharge power. The minimum nanoparticle size was 26.10 nm for the sample prepared using discharge pulse duration of 0.1 ms. This is the first attempt to employ fast discharge pulses to induce and assist the chemical reaction of silane and ammonia to produce highly-pure silicon nitride nanopowders.

在这项工作中，硅烷和氨气的化学反应是通过在大约 3 毫巴的压力下氩气放电过程中转移到反应体积的电能来诱导和辅助的。该功率作为具有不同持续时间的短脉冲施加到反应体积以产生高纯度多晶Si ₃ N ₄纳米颗粒。通过使用更短的放电功率脉冲来减少晶面的数量。对于使用 0.1 ms 的放电脉冲持续时间制备的样品，最小纳米颗粒尺寸为 26.10 nm。这是首次尝试使用快速放电脉冲来诱导和辅助硅烷和氨的化学反应，以生产高纯度氮化硅纳米粉末。