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Synthesis of Silicon and Silicon Carbide Nanoparticles by Pulsed Electrical Discharges in Dielectric Liquids
Plasma Chemistry and Plasma Processing ( IF 3.6 ) Pub Date : 2021-09-07 , DOI: 10.1007/s11090-021-10205-3
Ahmad Hamdan 1 , Douaa El Abiad 1 , Min Suk Cha 2
Affiliation  

Silicon carbide (SiC) has been widely used in many applications, which require high mechanical endurance or high electrical resistance. It also serves as a basic material for light emitting diodes. Here, we present an in-liquid plasma method to produce SiC nanoparticles. A sustained spark-discharge in a dielectric liquid, which is energized by a nanosecond pulsed power supply, is established for the synthesis. To provide Si and C, we employed graphite and silicon as electrodes and cyclohexane (CHX) and tetramethylsilane (TMS) as dielectric liquids. For a reasonable comparison, we tested various combinations of electrode and liquid, namely Si-to-C in CHX, Si-to-Si in CHX, and C-to-C in TMS. We found that discharges in CHX produce Si particles encapsulated in C-shell and Si nanoparticles in C-matrix. Meanwhile, discharges in TMS consistently produce SiC nanoparticles with an average size of ~ 10 nm, regardless of the electrode material.



中文翻译:

在电介质液体中通过脉冲放电合成硅和碳化硅纳米颗粒

碳化硅 (SiC) 已广泛应用于许多需要高机械耐久性或高电阻的应用中。它还用作发光二极管的基本材料。在这里,我们提出了一种液体等离子体方法来生产 SiC 纳米颗粒。在由纳秒脉冲电源供电的介电液体中持续火花放电用于合成。为了提供 Si 和 C,我们使用石墨和硅作为电极,使用环己烷 (CHX) 和四甲基硅烷 (TMS) 作为介电液体。为了进行合理的比较,我们测试了电极和液体的各种组合,即 CHX 中的 Si-to-C、CHX 中的 Si-to-Si 和 TMS 中的 C-to-C。我们发现 CHX 中的放电产生封装在 C 壳中的 Si 颗粒和 C 基质中的 Si 纳米颗粒。同时,

更新日期:2021-09-07
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