Direct laser writing carbonization has been recently developed to enable facile fabrication of patternable nanometer-thick two-dimensional amorphous carbon films, which may find promising applications in high-performance sensing, energy storage, catalysis, biomaterials etc. Given its nanometer-thick character and brittleness in nature, it is quite challenging to evaluate and characterize the mechanical properties of this novel material. With assistance of a sacrificial-layer transfer approach for sample preparation, herein, we rely on wrinkling metrology as a viable tool for characterizing the elastic modulus of the laser-fabricated nanometer thick amorphous carbon films. Moreover, upon combining the wrinkling metrology with channel cracking behavior investigation, the strength-related mechanical properties, including fracture toughness, fracture strength and fracture strain of the carbon thin films of varied thickness have been evaluated comprehensively. Within the experimental conditions being studied, the elastic modulus, fracture toughness, fracture strength and fracture strain of the laser-fabricated nanometer-thick carbon films respectively fall in a range of 23.1–34.9 GPa, 16.3–151.7 J/m², 0.5–1.4 GPa, and 2.0–4.5%. The results and methodology presented in this study demonstrate the usefulness of combining wrinkling metrology and cracking technique as a simple but generally applicable approach for comprehensive characterization and evaluation of the mechanical properties of different types of brittle and nanometer-thick thin films.

最近开发的直接激光写入碳化能够轻松制造可图案化的纳米厚二维无定形碳膜，这可能会在高性能传感、能量存储、催化、生物材料等方面找到有前景的应用。鉴于其纳米厚的特性和由于自然界的脆性，评估和表征这种新型材料的机械性能非常具有挑战性。在用于样品制备的牺牲层转移方法的帮助下，在这里，我们依靠起皱计量学作为表征激光制造的纳米厚非晶碳膜的弹性模量的可行工具。此外，将起皱计量与通道开裂行为研究相结合，强度相关的机械性能，包括断裂韧性，对不同厚度碳薄膜的断裂强度和断裂应变进行了综合评价。在所研究的实验条件下，激光制造的纳米厚碳膜的弹性模量、断裂韧性、断裂强度和断裂应变分别落在 23.1-34.9 GPa、16.3-151.7 J/m 的范围内²，0.5-1.4 GPA，和2.0-4.5％。本研究中提出的结果和方法证明了将起皱计量学和开裂技术相结合作为一种简单但普遍适用的方法来综合表征和评估不同类型的脆性和纳米厚薄膜的机械性能的有用性。