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Gas Sensors Based on Pseudohexagonal Phase of Gallium Oxide
Physica Status Solidi (B) - Basic Solid State Physics ( IF 1.6 ) Pub Date : 2021-09-01 , DOI: 10.1002/pssb.202100306
A.V. Almaev 1 , V.I. Nikolaev 2, 3 , P.N. Butenko 1, 3 , S.I. Stepanov 2, 3 , A.I. Pechnikov 2, 3 , N.N. Yakovlev 1 , I.M. Sinyugin 1 , S.V. Shapenkov 1, 4 , M.P. Scheglov 3
Affiliation  

The electrical conductivity of pseudohexagonal ε(κ)-Ga2O3 films under different ambient gases (H2, NO2, O2, and CO) is studied in a range of temperatures from 400 to 550 °C. The exposure of ε(κ)-Ga2O3 to reducing gases such as H2 and CO results in a reversible increase in current and conductance. The exposure to the oxidizing gases such as NO2 and O2 has the opposite effect. The maximum response to reducing gases (H2 and CO) is observed at 500 °C and to oxidizing gases at 550 and 450 °C for NO2 and O2, respectively. The highest sensitivity to H2 is achieved at low applied voltages (≤7.9 V). In contrast, the highest sensitivity to NO2 is observed at high applied voltages. The response and recovery times and temporal drift of ε(κ)-Ga2O3 characteristics under different ambient are estimated. Polycrystalline ε(κ)-Ga2O3 exhibits the semiconducting mechanism of electron transport at high temperatures. A qualitative model of the gas-sensing effect based on the modulation of electron concentration near the surface region of ε(κ)-Ga2O3 due to the chemisorption of gas molecules is described. Tin doping of ε(κ)-Ga2O3 increases the response to H2 at the temperature range from 25 to 550 °C.

中文翻译:

基于氧化镓假六方相的气体传感器

研究了在400~550°C温度范围内不同环境气体(H 2、NO 2、O 2和CO)下拟六角形ε(κ)-Ga 2 O 3薄膜的电导率。ε(κ)-Ga 2 O 3暴露于还原性气体如 H 2和 CO 会导致电流和电导的可逆增加。暴露于氧化性气体如 NO 2和 O 2会产生相反的效果。对还原性气体(H 2和 CO)的最大响应在 500 °C 时观察到,对氧化性气体的最大响应在 550 和 450 °C 时观察到 NO 2和 O 2, 分别。对 H 2的最高灵敏度是在低施加电压 (≤7.9 V) 下实现的。相反,在高施加电压下观察到对 NO 2的最高灵敏度。估计了不同环境下ε(κ)-Ga 2 O 3特性的响应和恢复时间以及时间漂移。多晶ε(κ)-Ga 2 O 3在高温下表现出电子传输的半导体机制。描述了气体分子化学吸附引起的基于ε(κ)-Ga 2 O 3表面区域附近电子浓度调制的气体传感效应定性模型。ε(κ)-Ga 2的锡掺杂在 25 至 550 °C 的温度范围内,O 3增加了对 H 2的响应。
更新日期:2021-09-01
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