Optomechanical systems combine extreme sensitivity and bandwidth in the control of mechanical motion, of interest for various applications. Integrated on a chip, actuated and detected all-optically by a single laser, they could disrupt sensing technologies. We introduce here a multiphysics model that describes their operation in the oscillating mode, under sinusoidal modulation of the laser, when both photothermal forces and radiation pressure/electrostriction are present, and when (non)linear absorption occurs in the device. The model is validated by systematic experiments on ultra-high frequency optomechanical disk resonators and leads to a quantitative assessment of the amplitude and phase of the demodulated output signal, which carries the sensing information.

中文翻译：

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在振荡模式下光学驱动和检测的超高频光机械谐振器的多物理场模型

光机系统在机械运动控制中结合了极高的灵敏度和带宽，对各种应用都很感兴趣。集成在芯片上，由单个激光器全光驱动和检测，它们可能会破坏传感技术。我们在此介绍了一个多物理场模型，该模型描述了它们在振荡模式下的操作，在激光的正弦调制下，当光热力和辐射压力/电致伸缩都存在时，以及当设备中发生（非线性）线性吸收时。该模型通过对超高频光机械盘谐振器的系统实验进行验证，并导致对带有传感信息的解调输出信号的幅度和相位进行定量评估。