Abstract

A brief description of the ion-beam analytical complex used for the work is given. The possibilities of elemental analysis of the materials as a result of using the methods of Rutherford ion backscattering and X‑ray fluorescence under ionic excitation are shown. A brief description of these methods and the conditions for their implementation is given. It is shown that the highest efficiency of elemental analysis is achieved when they are applied together. Experimental data showing the efficiency of using such an analysis in diagnostics of the elemental composition of residues of dry liquids and solid materials, including thin-film ferroelectric films, are presented.

中文翻译：

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通过离子束诊断方法对材料进行元素分析

摘要

给出了用于这项工作的离子束分析复合物的简要描述。显示了在离子激发下使用卢瑟福离子背散射和 X 射线荧光方法对材料进行元素分析的可能性。给出了这些方法的简要说明及其实施条件。结果表明，当它们一起应用时，元素分析的效率最高。实验数据显示了在诊断干燥液体和固体材料（包括薄膜铁电薄膜）残留物的元素组成中使用这种分析的效率。