This letter presents the design, modeling, and optimization of a bistable electromagnetic actuator of size 2.2 mm × 2.2 mm, consisting of a hard magnet membrane, a planar coil, and a permanent magnet. An analytical model is established to calculate the magnetic field generated by the coil, which is validated by the finite-element method. Based on the theoretical analysis of magnetic force, the actuator's parameters are optimized to maximize the magnetic force for large deflection. Moreover, a multiphysics simulation is implemented to characterize the electromagnetic and mechanical performance to predict the static response. We developed an actuator with process feasibility and a deflection of 140 µm, which can maintain the pull-in state without power consumption. The simulation and analytical results are in good agreement, demonstrating the accuracy and practicality of the methodology for a wide spectrum of electromagnetic actuators.

中文翻译：

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大偏转双稳态电磁执行器的设计、建模和优化

这封信介绍了尺寸为 2.2 mm × 2.2 mm 的双稳态电磁执行器的设计、建模和优化，该执行器由硬磁膜、平面线圈和永磁体组成。建立了一个解析模型来计算线圈产生的磁场，并通过有限元方法进行验证。基于磁力的理论分析，优化执行器的参数，以最大化大偏转的磁力。此外，还实施了多物理场仿真来表征电磁和机械性能，以预测静态响应。我们开发了一种工艺可行且偏转为140 µm的致动器，可以在不消耗功率的情况下保持吸合状态。模拟和分析结果吻合良好，