In this paper, a novel quality factor trimming method for a 2-axis mode-matched resonator using thermoelastic dissipation (TED) is reported. A disk resonator was designed so that the Q-factor is mainly limited by TED, in which the effect of energy dissipation can be tuned by mechanical trimming. The trimming location are carefully chosen to independently modify the Q-factors of each axis. In addition, the trimming structure is designed not to affect the resonant frequencies. From the numerical experiment, the Q-factor trimming as much as 108% could be achieved while the frequency change was 4.7% at the maximum.

中文翻译：

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基于热弹性耗散的多环谐振器品质因数修整方法

在本文中，报告了一种使用热弹性耗散 (TED) 的 2 轴模式匹配谐振器的新型品质因数微调方法。设计了一个圆盘谐振器，使得 Q 因子主要受 TED 限制，其中能量耗散的影响可以通过机械微调进行调整。修剪位置经过精心选择，以独立修改每个轴的 Q 因子。此外，微调结构的设计不会影响谐振频率。从数值实验来看，可以实现高达 108% 的 Q 因子微调，而频率变化最大为 4.7%。