Scanning electron beam micro-polishing is a new technique to reduce surface roughness using molten metal to fill pits under gravity's action spontaneously. In this study, through the establishment of the electron beam heat source model and heat conduction model, it is easy to obtain the mathematical and physical model of heat balance for continuous scanning electron beam process under micro-melting polishing and to discuss the influence of regularity of electron beam process parameters on the surface morphology and microstructure. The results showed that the surface roughness of 45 steel was reduced after scanning electron beam processing. The lowest value was 0.34 μm with a reduction of 83%. It was found that the melt zone was mostly martensite with fine grains by further measuring and analyzing the microstructure and hardness of the polished sample. The maximum hardness was 870 HV in the subsurface layer.

扫描电子束微抛光是一种利用熔融金属在重力作用下自发填充凹坑来降低表面粗糙度的新技术。本研究通过电子束热源模型和热传导模型的建立,很容易得到微熔抛光连续扫描电子束过程热平衡的数学和物理模型,并讨论规律性的影响电子束工艺参数对表面形貌和微观结构的影响。结果表明，45钢经过扫描电子束加工后表面粗糙度有所降低。最低值为 0.34 μm，减少了 83%。通过对抛光后试样的显微组织和硬度的进一步测量和分析，发现熔体区多为细晶粒马氏体。次表层的最大硬度为 870 HV。