Miniaturized optical spectrometers have been realized by exploiting conventional working principles and advanced nanofabrication technology. Especially in the mid-infrared (MIR) range, chip-scale optical spectrometers enable fast and on-site detection of molecular fingerprints for selective chemical sensing in healthcare and environmental monitoring. This miniaturization is also highly desirable for the wearable devices where the tiny functional parts remain on rigid substrates but the electronics are flexible. In the last decade, the triboelectric nanogenerator (TENG) technology has been proven as an indispensable and enabling technology for wearable self-powered sensors, energy harvesters and voltage sources, etc. Although a few TENG based gas sensors have been demonstrated, each of these sensors can detect a particular gas other than diversified gases. Infrared spectrometer is known as an instrument which can investigate the infrared absorption characteristics of gas molecules. It is the best generic technology to sense multiple gases on the same instrument, or device. In this study, we demonstrate a TENG enabled tunable Fabry-Pérot (FP) photonic-crystal-slab filter aiming for the computational spectrometer in the MIR range. The textile-triboelectric nanogenerator (T-TENG) provides high open-circuit voltage to shift the resonance wavelengths of the electrostatically actuated FP-filter, where this feature provides the sampling bases required for the computational spectrometer. Furthermore, the FP-filter is fabricated by a new transfer-printing method and shows a large wavelength tunability. As a proof of concept, the transmission spectrum of acetone vapor is reconstructed from 5 to 6.5 µm using this TENG enabled FP-filter. The molecular fingerprint of acetone is identified at 5.75 µm. This work paves the way towards the wearable MIR miniaturized optical spectrometer.

利用传统的工作原理和先进的纳米加工技术，实现了微型化光谱仪。特别是在中红外 (MIR) 范围内，芯片级光谱仪能够快速现场检测分子指纹，用于医疗保健和环境监测中的选择性化学传感。这种小型化对于可穿戴设备来说也是非常理想的，其中微小的功能部件保留在刚性基板上，但电子设备是柔性的。在过去的十年中，摩擦纳米发电机 (TENG) 技术已被证明是可穿戴自供电传感器、能量收集器和电压源等不可或缺的使能技术。 尽管已经证明了一些基于 TENG 的气体传感器，这些传感器中的每一个都可以检测除多种气体之外的特定气体。红外光谱仪是一种可以研究气体分子红外吸收特性的仪器。它是在同一仪器或设备上检测多种气体的最佳通用技术。在这项研究中，我们展示了一种启用 TENG 的可调谐法布里-珀罗 (FP) 光子晶体平板滤波器，其目标是中红外范围内的计算光谱仪。纺织摩擦纳米发电机 (T-TENG) 提供高开路电压以改变静电驱动的 FP 滤波器的共振波长，此功能提供了计算光谱仪所需的采样基础。此外，FP 滤波器是通过新的转移印刷方法制造的，并显示出大的波长可调性。作为概念证明，使用这种启用 TENG 的 FP 过滤器，丙酮蒸气的透射光谱从 5 到 6.5 µm 重建。丙酮的分子指纹识别为 5.75 µm。这项工作为可穿戴中红外微型光谱仪铺平了道路。