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Laser annealing of epitaxial CaF2 films on Si
Thin Solid Films ( IF 2.1 ) Pub Date : 2021-08-18 , DOI: 10.1016/j.tsf.2021.138898
A.V. Dvurechenskii 1, 2 , Zh.V. Smagina 1 , V.A. Volodin 1, 2 , A.V. Kacyuba 1 , V.A. Zinovyev 1 , G.D. Ivlev 3 , S.L. Prakopyeu 3
Affiliation  

Nanosecond time-resolved reflectivity and transmission changes in CaF2/Si(111) structures were measured to study the phase transitions, surface modification and radiolysis induced by nanosecond ruby laser pulses. The Si lattice heating up to the melting point leads to the nanohills formation on the surface of the structure, the height of which does not exceed 100 nm with the average base diameter of 360 nm and the surface density of 2•108cm– 2. The Raman scattering and energy-dispersive X-ray spectroscopy data indicate that the nanohills contain cavities inside them, and they are filled with the gas of Si2F6 molecules. The shell of the nanohills, obviously, consists of calcium oxide.



中文翻译:

Si上外延CaF2薄膜的激光退火

测量了 CaF 2 /Si(111) 结构的纳秒时间分辨反射率和透射率变化,以研究由纳秒红宝石激光脉冲引起的相变、表面改性和辐射分解。Si晶格加热到熔点导致结构表面形成纳米小丘,高度不超过100 nm,平均基底直径为360 nm,表面密度为2•10 8 cm – 2 . 拉曼散射和能量色散 X 射线光谱数据表明,纳米山内部包含空腔,并且充满了 Si 2 F 6分子的气体。显然,纳米山的外壳由氧化钙组成。

更新日期:2021-08-25
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