Soft and stretchable sensors are essential to the development of electronic skin, especially their potential applications in health care and intelligent robots, which have increasingly attracted attentions. Herein, inspired by the epidermal tissue hierarchy, we propose a high-sensitivity fully soft capacitive pressure sensor with bionic spine–pillar microstructure. Benefiting from the combination of the random microscale spines and the millimeter-sized pillar array prepared based on polydimethylsiloxane, the proposed sensor exhibits a well deformability, a high sensitivity up to 2.87 k/Pa at low-pressure range, and a broad linear pressure dynamic range from 5 Pa to 100 kPa. A simple equivalent circuit model was established to demonstrate the sensing mechanism and geometric effect. For practical application demonstrations, the sensor was utilized to monitor local subtle and large movements of the skin, such as finger bending, wrist bending, swallowing, and facial muscle movements. The sensor shows a conformality with human skin to follow the skin extension closely. Furthermore, the proposed sensing strategy can provide a distinguishable tactile feedback for controlling robot arm and soft claw in various tasks, illustrating its potential applications in robotics.

中文翻译：

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基于仿生脊柱-支柱结构的机器人运动监测全软压力传感器

柔软和可拉伸的传感器对于电子皮肤的发展至关重要，尤其是在医疗保健和智能机器人方面的潜在应用越来越受到关注。在此，受表皮组织层次结构的启发，我们提出了一种具有仿生脊柱-柱微结构的高灵敏度全软电容压力传感器。受益于随机微尺度脊柱和基于聚二甲基硅氧烷制备的毫米级柱阵列的组合，所提出的传感器表现出良好的可变形性、在低压范围内高达 2.87 k/Pa 的高灵敏度和宽的线性压力动态范围从 5 Pa 到 100 kPa。建立了一个简单的等效电路模型来演示传感机制和几何效应。对于实际应用演示，该传感器用于监测皮肤的局部细微和大运动，例如手指弯曲、手腕弯曲、吞咽和面部肌肉运动。传感器显示出与人体皮肤的适形性，以紧密跟随皮肤延伸。此外，所提出的传感策略可以为在各种任务中控制机器人手臂和软爪提供可区分的触觉反馈，说明其在机器人技术中的潜在应用。