Deterministically integrating single solid-state quantum emitters with photonic nanostructures serves as a key enabling resource in the context of photonic quantum technology. Due to the random spatial location of many widely-used solid-state quantum emitters, a number of positioning approaches for locating the quantum emitters before nanofabrication have been explored in the last decade. Here, the working principles of several nanoscale positioning methods and the most recent progress in this field, covering techniques including atomic force microscopy, scanning electron microscopy, confocal microscopy with in situ lithography, and wide-field fluorescence imaging are reviewed. A selection of representative device demonstrations with high-performance is presented, including high-quality single-photon sources, bright entangled-photon pairs, strongly-coupled cavity QED systems, and other emerging applications. The challenges in applying positioning techniques to different material systems and opportunities for using these approaches for realizing large-scale quantum photonic devices are discussed.

中文翻译：

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用于将单个固态量子发射器与光子纳米结构集成的纳米级定位方法

在光子量子技术的背景下，确定性地将单个固态量子发射器与光子纳米结构集成在一起是一种关键的使能资源。由于许多广泛使用的固态量子发射器的随机空间位置，在过去十年中已经探索了许多用于在纳米制造之前定位量子发射器的定位方法。在这里，回顾了几种纳米级定位方法的工作原理和该领域的最新进展，涵盖的技术包括原子力显微镜、扫描电子显微镜、原位光刻共聚焦显微镜和宽视场荧光成像。展示了一系列具有代表性的高性能器件演示，包括高质量的单光子源、明亮的纠缠光子对、强耦合腔 QED 系统和其他新兴应用。讨论了将定位技术应用于不同材料系统的挑战以及使用这些方法实现大规模量子光子器件的机会。