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Final report on supplementary comparison on step heights standards (APMP.L-S7)
Metrologia ( IF 2.4 ) Pub Date : 2021-08-11 , DOI: 10.1088/0026-1394/58/1a/04003
Rina Sharma 1 , Girija Moona 1 , Anusorn Tonmueanwai 2 , Jariya Buajarern 2 , Wang Shihua 3 , Michael Matus 4 , Takuma Doi 5 , Kentaro Sugawara 5
Affiliation  

This intercomparison is carried out for step height standards with nominal step sizes 8 nm, 18 nm, 88 nm and 10 m using non-contact measurement methods, with four participating NMIs. Measurement observation from the pilot laboratory exhibit significant stability of step height standards. For each step height standard, the supplementary comparison reference value (SCRV) is determined using weighted mean, followed by calculation of En values for outlier identification. Further the outliers were excluded based upon the Birge Ratio consistency test. Measurement results from all the participating NIMs have been compiled in this report.

To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database https://www.bipm.org/kcdb/.

The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).



中文翻译:

台阶高度标准补充比较的最终报告 (APMP.L-S7)

使用非接触式测量方法对标称步长为 8 nm、18 nm、88 nm 和 10 m 的步高标准进行了比对,其中有四个 NMI。中试实验室的测量观察显示出台阶高度标准的显着稳定性。对于每个台阶高度标准,补充比较参考值 (SCRV) 使用加权平均值确定,然后计算En值以进行异常值识别。此外,基于 Birge Ratio 一致性测试排除了异常值。本报告汇编了所有参与的 NIM 的测量结果。

要访问本文的正文,请单击最终报告。请注意,此文本出现在 BIPM 密钥比较数据库 https://www.bipm.org/kcdb/ 的附录 B 中。

根据 CIPM 互认安排 (CIPM MRA) 的规定,最终报告已通过同行评审并由 CCL 批准发布。

更新日期:2021-08-11
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