We design and estimate the performance of an integrated Bragg grating (IBG) filter that has Si₃N₄-filled periodic grooves on a silicon strip waveguide. Also, the entire IBG filter is covered with Si₃N₄ cladding. The refractive index variation along the length of the filter is achieved by the periodic Si₃N₄-filled corrugations. We consider different geometries of grooves that can be other than the ideal rectangular shape as a result of fabrication limitations. Moreover, we also include the stress-optic effect, which arises because of the different thermal expansion coefficients and lattice constants of the core and cladding materials, to estimate filter performance. We categorically estimate the impact of groove geometry and the stress-optic effect on the filter performance—namely, resonance wavelength, bandwidth, extinction ratio, and side-lobe suppression ratio. Also, the effects of varying the waveguide width, cladding thickness, and corrugation depth on the optical performance of the proposed filter is studied. Our numerical studies reveal that a larger magnitude of stress can be found for lower waveguide width, lower cladding thickness, lower corrugation depth, and rectangular corrugation shape. The estimated changes in the resonance wavelength, bandwidth, extinction ratio, and side-lobe suppression ratio due to the stress effect and geometrical variation of the groove for the IBG filter designed with a waveguide width of 300 nm (600 nm), cladding thickness of 100 nm (400 nm), and rectangular corrugation depth of 10 nm (50 nm) are 1891 pm (1593 pm), 21% (3.8%), 27.2% (5.5%), and 26.9% (5.4%), respectively. The significant performance variation in the IBG filter due to stress and groove shapes emphasizes the need to address these factors to estimate the performance of the proposed IBG filter.

我们设计并评估了集成布拉格光栅 (IBG) 滤波器的性能，该滤波器在硅条形波导上具有 Si ₃ N ₄填充的周期性凹槽。此外，整个 IBG 滤波器都覆盖有 Si ₃ N ₄包层。沿滤光片长度的折射率变化是通过周期性的 Si ₃ N ₄- 填充波纹。由于制造限制，我们考虑了不同几何形状的凹槽，这些几何形状可能不是理想的矩形。此外，我们还包括由于芯材和包层材料的不同热膨胀系数和晶格常数而产生的应力光学效应，以估计滤波器性能。我们明确地估计了凹槽几何形状和应力光学效应对滤波器性能的影响——即共振波长、带宽、消光比和旁瓣抑制比。此外，研究了改变波导宽度、包层厚度和波纹深度对所提出的滤波器光学性能的影响。我们的数值研究表明，对于较低的波导宽度、较低的包层厚度、较低的波纹深度，矩形波纹形状。波导宽度为 300 nm (600 nm)、包层厚度为100 nm (400 nm) 和 10 nm (50 nm) 的矩形波纹深度分别为 1891 pm (1593 pm)、21% (3.8%)、27.2% (5.5%) 和 26.9% (5.4%)。由于应力和凹槽形状而导致 IBG 滤波器的显着性能变化强调需要解决这些因素以估计所提出的 IBG 滤波器的性能。波导宽度为 300 nm (600 nm)，包层厚度为 100 nm (400 nm)，矩形波纹深度为 10 nm (50 nm) 分别为 1891 pm (1593 pm)、21% (3.8%)、27.2% (5.5%) 和 26.9% (5.4%)。由于应力和凹槽形状而导致 IBG 滤波器的显着性能变化强调需要解决这些因素以估计所提出的 IBG 滤波器的性能。波导宽度为 300 nm (600 nm)，包层厚度为 100 nm (400 nm)，矩形波纹深度为 10 nm (50 nm) 分别为 1891 pm (1593 pm)、21% (3.8%)、27.2% (5.5%) 和 26.9% (5.4%)。由于应力和凹槽形状而导致 IBG 滤波器的显着性能变化强调需要解决这些因素以估计所提出的 IBG 滤波器的性能。