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Method for acquiring accurate coordinates of the source point in electron backscatter diffraction
Journal of Microscopy ( IF 2 ) Pub Date : 2021-08-12 , DOI: 10.1111/jmi.13055
Yongsheng Zhang 1, 2 , Yitian Shen 1, 2 , Fan Peng 1, 2 , Caifen Jiang 1 , Wei Li 3 , Hong Miao 3 , Fuqiang Huang 1 , Yi Zeng 1
Affiliation  

An electron backscatter diffraction device is an important accessory for a scanning electron microscope and can provide crystal structure orientation and phase content data through analysis of electron backscatter diffraction patterns. The acquisition of these data depends on pattern indexing, including interplanar angle calculation and crystal plane indexation. The coordinates of the source point are key points for interplanar angle calculation, and they vary with the movement of the incident beam. In this study, we first combined the grey gradient calculation with screen moving method to achieve accurate positioning of source point and obtained coordinates of source point with sub-pixel precision. The errors of three coordinates were 0.07%, 0.06% and 0.04%, respectively. By using this coordinate of source point to conduct interplanar angle calculation the maximum error was 0.53°, which was a good proof of the accuracy of source point positioning. Then we established the relationship between source point coordinates variation and incident beam movement. Coordinates can be given out based on the displacement of beam directly. And to illustrate the accuracy, interplanar angle calculation was performed and the maximum error was 0.81°. This means that the relationship between variation of source point coordinates and beam movement is highly accurate.

中文翻译:

电子背散射衍射源点精确坐标的获取方法

电子背散射衍射仪是扫描电子显微镜的重要附件,通过对电子背散射衍射图的分析,可以提供晶体结构取向和相含量数据。这些数据的获取取决于模式索引,包括面间角计算和晶面索引。源点坐标是计算面间角的关键点,它们随着入射光束的运动而变化。在本研究中,我们首先将灰度梯度计算与屏幕移动方法相结合,实现源点的精确定位,并获得亚像素精度的源点坐标。三个坐标的误差分别为0.07%、0.06%和0.04%。利用该源点坐标进行面间角计算,最大误差为0.53°,很好地证明了源点定位的准确性。然后我们建立了源点坐标变化与入射光束运动之间的关系。坐标可以直接根据梁的位移给出。并且为了说明精度,进行了面间角计算,最大误差为0.81°。这意味着源点坐标的变化与光束运动之间的关系是高度准确的。坐标可以直接根据梁的位移给出。并且为了说明精度,进行了面间角计算,最大误差为0.81°。这意味着源点坐标的变化与光束运动之间的关系是高度准确的。坐标可以直接根据梁的位移给出。并且为了说明精度,进行了面间角计算,最大误差为0.81°。这意味着源点坐标的变化与光束运动之间的关系是高度准确的。
更新日期:2021-08-12
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