Hyphenated techniques, providing comprehensive information in various aspects such as constituent, structure, functional group, and morphology, play an important role in scientific research. Nowadays, coupling characterization of the same position in microscale is in great need in the field of nanomaterial research and exploration. In this article, a new hyphenated technique was developed to facilitate the coupling characterization of atomic force microscope (AFM) and scanning electron microscope (SEM) by designing a universal positioning system. The system consisted of a specimen holder with coordinate grids and a software for converting the coordinate values of the same point to fit SEM, specimen holder, and AFM system. In working condition, the coordinates of the labeled points and target position were firstly extracted from the SEM operation software, then converted into the numerical values adapted to the specimen holder itself, and finally transformed into the coordinates matching the AFM system. The experimental result showed that a retrieving rate of 96% was achieved for a spherical target with a diameter of 1 μm in a square. The hyphenated technique is a universal, accurate, efficient, and financially feasible method in microanalysis field and has great application potential.

中文翻译：

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用于 SEM 和 AFM 耦合表征的通用定位系统

联用技术在组成、结构、官能团和形态等各个方面提供综合信息，在科学研究中发挥着重要作用。如今，纳米材料研究和探索领域非常需要在微米尺度上进行相同位置的耦合表征。在本文中，开发了一种新的连字符技术，通过设计通用定位系统来促进原子力显微镜 (AFM) 和扫描电子显微镜 (SEM) 的耦合表征。该系统由一个带有坐标网格的样品架和一个用于转换同一点坐标值以适合 SEM、样品架和 AFM 系统的软件组成。在工作状态下，首先从SEM操作软件中提取标记点的坐标和目标位置，然后转换为适合样品架本身的数值，最后转换为与AFM系统匹配的坐标。实验结果表明，对直径为 1 μ m 在 a正方形。联用技术是微量分析领域通用、准确、高效、经济可行的方法，具有很大的应用潜力。