In the semiconductor manufacturing industry, the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control. However, the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping (the frequency is between 0 Hz and the natural frequency). In this paper, an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system (DSA-SAVIS) is proposed. This system has a significant anti-resonance characteristic; that is, the vibration amplitude can drop to nearly zero at a particular frequency, which is called the anti-resonance frequency. The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic. Experimental results show that the closed-loop transmissibility is less than −15 dB from 0 Hz to the initial anti-resonance frequency. Furthermore, it is less than −30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller, the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5% for the impulse disturbance applied to the platform base. Simultaneously, the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances, and a good vibration isolation performance is achieved. This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment, especially at frequency sweeping in the semiconductor manufacturing industry.

在半导体制造行业中，被控对象的动态模型通常是在运动控制之前通过扫频方法获得的。然而，现有的隔离器不能很好地隔离扫频时（频率在0Hz和固有频率之间）对平台基座惯性力的扰动。在本文中，提出了一种用于双级驱动半主动隔振系统（DSA-SAVIS）的可调反谐振频率控制器。该系统具有显着的抗谐振特性；也就是说，在特定频率下，振动幅度可以下降到接近于零，这称为反共振频率。所提出的控制器旨在添加可调节的反谐振频率，以充分利用这种独特的反谐振特性。实验结果表明，从 0 Hz 到初始反谐振频率，闭环传输率小于 -15 dB。此外，它在增加的反谐振频率附近小于 -30 dB，可以通过改变所提出的控制器的参数将其从 0 Hz 调整到初始反谐振频率。使用所提出的控制器，有效载荷的扰动幅度从 4 毫米/秒衰减到 0.5 毫米/秒，施加到平台底座的脉冲扰动减少了 87.5%。同时，该系统可以通过跟踪扫频扰动实时调整反共振频率点，具有良好的隔振性能。这表明 DSA-SAVIS 和提出的控制器可以应用于保证超低振动环境，