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Multi-phase titanium oxide LIPSS formation under fs laser irradiation on titanium thin films in ambient air
Optical Materials Express ( IF 2.8 ) Pub Date : 2021-08-09 , DOI: 10.1364/ome.431210
Paulina Segovia , Abraham Wong , Ricardo Santillan , Marco Camacho-Lopez , Santiago Camacho-Lopez

The formation of laser-induced periodic surface structures (LIPSS) on Ti thin films, their phase and stoichiometric evolution, as a function of well below ablation threshold laser fluence, and the number of pulses, is investigated. The experiments were carried out in ambient air by using a femtosecond laser at a wavelength of 1030 nm with a pulse duration of 270 fs, operating at a repetition rate of 18.6 kHz. On the one hand, the formation of LSFL composed by an either single phase (C-Ti2O3 or r-TiO2-x) or a two-phase mixture of titanium oxide (C-Ti2O3 +r-TiO2-x) is reported. The titanium oxide phases were obtained by micro-Raman spectroscopy. The orientation of the LSFL, either parallel or perpendicular with respect to the polarization of the incident beam, correlate well with the electronic nature of the titanium oxide phases. On the other hand, the results also show the formation of HSFL, this under low cumulative fluence, with periods of 398 and 460 nm with a two-phase mixture of titanium oxide in the form ofa-Ti2O3+ C-Ti2O3and C-Ti2O3+ r-TiO2-x, respectively. To the best of our knowledge this is the first time that single phase C-Ti2O3 or r-TiO2-x LIPSS are reported.

中文翻译:

fs激光照射下环境空气中钛薄膜的多相氧化钛LIPSS形成

研究了激光诱导周期表面结构 (LIPSS) 在 Ti 薄膜上的形成、它们的相位和化学计量演变,作为远低于烧蚀阈值激光能量密度的函数,以及脉冲数。通过使用波长为 1030 nm、脉冲持续时间为 270 fs、重复频率为 18.6 kHz 的飞秒激光器在环境空气中进行实验。一方面,LSFL 的形成由单相(C-Ti 2 O 3或 r-TiO 2-x)或氧化钛的两相混合物(C-Ti 2 O 3 +r-TiO 2-x) 报道。通过显微拉曼光谱获得氧化钛相。LSFL 的方向(平行于或垂直于入射光束的偏振)与氧化钛相的电子性质密切相关。另一方面,结果还显示了 HSFL 的形成,这是在低累积注量下,周期为 398 和 460 nm,具有 a-Ti 2 O 3 + C-Ti 2形式的氧化钛两相混合物分别为O 3和C-Ti 2 O 3 + r-TiO 2-x。据我们所知,这是第一次将单相 C-Ti 2 O 3或 r-TiO报告了 2-x LIPSS。
更新日期:2021-09-02
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