We present the development of time-of-flight/energy (TOF-E) telescope for elastic recoil detection analysis (ERDA) in UTTAC at the University of Tsukuba. The designs of the TOF tube are introduced. The performance for the quantification and mass resolution for light elements is confirmed on a CaTaO_xN_y film deposited on a Si substrate. The results are cross-checked by the data taken by an existing ΔE-E telescope ERDA system, which was previously installed in MALT at The University of Tokyo. The newly developed system can be used to reveal the relationship between the film deposition condition and the contamination quantitatively on a Si-Al-N (SiAlN) film on a SiO₂ substrate. Finally, the analysis of a triple-layered metal nitrides film on a soda glass substrate, in which each layer has a thickness of 10 to15 nm, is shown. From the analysis of the surface peak of oxygen, the time resolution corresponds to depth resolution of 2.1 nm at the surface. The overall practical depth resolution conservatively estimated as better than 10 nm, because the depth profiles of various elements show clear counters corresponding to the three layers.

我们介绍了筑波大学 UTTAC 中用于弹性反冲探测分析 (ERDA) 的飞行时间/能量 (TOF-E) 望远镜的发展。介绍了TOF管的设计。轻元素的量化和质量分辨率的性能在沉积在 Si 衬底上的 CaTaO _x N _y膜上得到证实。结果通过现有 ΔE-E 望远镜 ERDA 系统获取的数据进行交叉检查，该系统之前安装在东京大学的 MALT 中。新开发的系统可用于定量揭示 SiO ₂上的 Si-Al-N (SiAlN) 膜上的膜沉积条件与污染之间的关系基质。最后，显示了对钠玻璃基板上三层金属氮化物膜的分析，其中每层厚度为 10 至 15 nm。从氧表面峰的分析来看，时间分辨率对应于表面2.1 nm的深度分辨率。整体实际深度分辨率保守估计优于 10 nm，因为各种元素的深度剖面显示对应于三层的清晰计数器。