A patterned laser lift-off technique is adopted for fabricating terahertz (THz) metamaterials with micrometer precision. A shaped UV laser pulse is used to remove low-viscosity silver nanopaste from a quartz substrate. Various types of metal THz metamaterials, including gradient metamaterials, can be obtained flexibly by movement of the sample and programming of the shaped beam. Two THz metamaterials, which are based on bridged double split ring resonator and its complementary resonator, respectively, are fabricated and tested. The results show that patterned laser lift-off based on a low-viscosity silver nanopaste film can supply a low-cost and easy-operation route in the fabrication of various THz metamaterials.

中文翻译：

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使用低粘度银纳米膏的图案化激光剥离制备太赫兹超材料

采用图案化激光剥离技术制造具有微米精度的太赫兹 (THz) 超材料。成形的紫外激光脉冲用于从石英基板上去除低粘度银纳米膏。通过样品的移动和成形光束的编程，可以灵活地获得各种类型的金属太赫兹超材料，包括梯度超材料。制作并测试了两种分别基于桥接双裂环谐振器及其互补谐振器的太赫兹超材料。结果表明，基于低粘度银纳米膏膜的图案化激光剥离可以为各种太赫兹超材料的制造提供低成本且易于操作的途径。