Optical microstructure arrays on metallic surfaces are drawing ever-increasing attention due to the increasing requirements in optical systems. Although vibration generators are developed for generating optical microarrays with the ultra-precision diamond cutting process, the systematic research works on its mechanical design, working performance simulation, and numerical simulation of microstructure arrays has received less attention. In this study, a novel two-degree-of-freedom vibration generator (2DOF-VG) is designed based on the triangular amplification mechanism. To precisely simulate the working performance of this designed 2DOF-VG, the detailed multi-physics finite element method is proposed. Considering the three-dimensional geometric shape of the cutting tool, the cutting motion trajectory, and the elastic recovery of the workpiece material, the numerical simulation algorithm of the microstructure arrays generation is then established and used to precisely predict the surface topography of microstructure arrays. Finally, two types of unique microstructure arrays are fabricated, which demonstrates the feasibility and flexibility of the 2DOF-VG.

中文翻译：

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用于制造光学微结构阵列的二自由度振动发生器的研制

由于对光学系统的要求不断提高，金属表面上的光学微结构阵列越来越受到关注。虽然振动发生器是为利用超精密金刚石切割工艺产生光学微阵列而开发的，但其机械设计、工作性能模拟和微结构阵列数值模拟的系统研究工作较少受到关注。在这项研究中，基于三角放大机制设计了一种新型的二自由度振动发生器（2DOF-VG）。为了精确模拟这种设计的 2DOF-VG 的工作性能，提出了详细的多物理场有限元方法。考虑刀具的三维几何形状，切削运动轨迹，和工件材料的弹性恢复，然后建立微结构阵列生成的数值模拟算法，并用于精确预测微结构阵列的表面形貌。最后，制造了两种独特的微结构阵列，证明了 2DOF-VG 的可行性和灵活性。