Purpose

Considering its vast utility in industries, this paper aims to present a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state-of-the-art gist to the researchers of the similar domain at one place.

Design/methodology/approach

Swiftly emerging research prospects in the micro-electro-mechanical system (MEMS) enable to build complex and sophisticated micro-structures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, detectors, actuators and many more on a single chip. One of the MEMS initial products that emerged into the micro-system technology is MEMS pressure sensor. Because of their high performance, low cost and compact in size, these sensors are extensively being adopted in numerous applications, namely, aerospace, automobile and bio-medical domain, etc. These application requirements drive and impose tremendous conditions on sensor design to overcome the tedious design and fabrication procedure before its reality. MEMS-based pressure sensors enable a wide range of pressure measurement as per the application requirements.

Findings

The paper provides a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state of the art gist to the researchers of the similar domain at one place.

Originality/value

The present paper discusses the basics of MEMS pressure sensors, their working principles, different design aspects, classification, type of sensing diaphragm used and illustration of various transduction mechanisms. Moreover, this paper presents a comprehensive review on present trend of research on MEMS-based pressure sensors, its applications and the research gap observed till date along with the scope for future work, which has not been discussed in earlier reviews.

中文翻译：

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压力传感器综述：从机械到微机电系统的视角

目的

考虑到其在工业中的广泛用途，本文旨在详细回顾压力传感器的基本原理、分类和进展，及其广泛的应用领域、设计方面和挑战，以提供最先进的要点同一领域的研究人员。

设计/方法/方法

微机电系统 (MEMS) 中迅速兴起的研究前景能够在包含移动质量、悬臂、弯曲、杠杆、连杆、阻尼器、齿轮、检测器、执行器等的基板上构建复杂而精密的微结构单芯片。微系统技术中出现的MEMS初始产品之一是MEMS压力传感器。由于其高性能、低成本和紧凑的尺寸，这些传感器被广泛应用于航空航天、汽车和生物医学领域等众多应用中。繁琐的设计和制造程序在其现实之前。

发现

该论文详细回顾了压力传感器的基本原理、分类和进展，及其广泛的应用领域、设计方面和挑战，以在一个地方为类似领域的研究人员提供最先进的要点。

原创性/价值

本文讨论了 MEMS 压力传感器的基础知识、它们的工作原理、不同的设计方面、分类、使用的传感膜片类型以及各种转换机制的说明。此外，本文对基于 MEMS 的压力传感器的当前研究趋势、其应用和迄今为止观察到的研究差距以及未来工作的范围进行了全面回顾，这些在之前的评论中没有讨论过。