The possibilities of improving the measurement accuracy of fiber-optic sensors of absolute distances of the nanometer range using the spectral method of fiber-optic low-coherence interferometry have been investigated. The possibility of measuring the distance with an error of no more than \( \pm 15~\) nm in the range of 20–250 μm has been shown.

中文翻译：

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用光谱低相干干涉法提高绝对距离测量精度的可能性

已经研究了使用光纤低相干干涉测量的光谱方法提高纳米范围绝对距离光纤传感器测量精度的可能性。已经显示了在 20-250 μm 范围内测量距离误差不超过\( \pm 15~\) nm的可能性。