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Dose measurement in the TEM and STEM
Ultramicroscopy ( IF 2.2 ) Pub Date : 2021-07-26 , DOI: 10.1016/j.ultramic.2021.113363
R F Egerton 1
Affiliation  

Practical aspects of dosimetry are considered, including the measurement of electron-beam current and current density. Complications that arise in the case of a focused probe or a STEM image are discussed and solutions proposed. Advantages of expressing the radiation dose in Grays are listed and a simple formula given for converting electron fluence to Gray units, based on a near constancy of the stopping power per atomic electron. Comparisons with stopping-power calculations and EELS measurements suggest that this formula is accurate to within 5%. Based on the stopping power formula, a new way of measuring the local mass-thickness of light-element specimens is proposed. The average energy loss per inelastic collision is shown to be higher than previous expectations.



中文翻译:

TEM 和 STEM 中的剂量测量

考虑了剂量学的实际方面,包括电子束电流和电流密度的测量。讨论了在聚焦探针或 STEM 图像的情况下出现的并发症并提出了解决方案。列出了以格雷表示辐射剂量的优点,并给出了一个简单的公式,用于将电子注量转换为格雷单位,基于每个原子电子的停止能力几乎恒定。与停止能力计算和 EELS 测量值的比较表明,该公式的准确度在 5% 以内。基于停止本领公式,提出了一种测量轻元素试样局部质量厚度的新方法。每次非弹性碰撞的平均能量损失表明高于先前的预期。

更新日期:2021-08-01
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