In view of the large thermal drift of microelectromechanical system (MEMS) triaxial accelerometer and the high cost of traditional calibration schemes, this article proposes a low-cost and efficient thermal drift calibration scheme combining the parameter-correction method and the proposed least squares method based on the nine-parameter model. In this scheme, first, the parameter-correction method is applied to the data collected under the heating condition to obtain the thermal drift of calibrated parameters with constant error. The least squares method is then used to obtain the parameters at a temperature $T_{c}$ . Then, the two sets of parameters are combined, and the constant offset error is removed. Finally, higher precision thermal drift curves of the parameters are obtained after smoothing and filtering. One thousand simulations show that the previously proposed parameter-correction method has consistent accuracy and can obtain accurate drift trends of the triaxial accelerometer parameters. The actual triaxial accelerometer thermal drift calibration experiment shows that when the temperature rises by 22 °C, the sensor data converted by the parameters obtained by the proposed scheme can effectively reduce the drift. The drifts of $x$ - and $y$ -axes are reduced from −19.2 and 11.6 mg to −0.7 and −0.6 mg, respectively. The $Z$ -axis drift is reduced from −23.9 to 3.5 mg. This proves the feasibility of the method and scheme proposed in this article.

中文翻译：

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MEMS 三轴加速度计的低成本高效热校准方案

针对微机电系统（MEMS）三轴加速度计热漂移大和传统标定方案成本高的问题，本文提出了一种结合参数修正法和提出的最小二乘法的低成本、高效的热漂移标定方案。九参数模型。在该方案中，首先对加热条件下采集的数据应用参数校正方法，得到具有恒定误差的校准参数的热漂移。然后使用最小二乘法获得温度下的参数 $T_{c}$ . 然后，将两组参数组合起来，去除恒定的偏移误差。最后，经过平滑和滤波后得到了更高精度的参数热漂移曲线。1000次仿真表明，先前提出的参数修正方法具有一致的精度，可以获得准确的三轴加速度计参数的漂移趋势。实际的三轴加速度计热漂移标定实验表明，当温度升高22℃时，所提方案得到的参数转换后的传感器数据可以有效降低漂移。的漂移 $x$ - 和 $y$ - 轴分别从 -19.2 和 11.6 毫克减少到 -0.7 和 -0.6 毫克。这 $Z$ - 轴漂移从 -23.9 减少到 3.5 毫克。这证明了本文提出的方法和方案的可行性。