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Photopatternable hydroxide ion electrolyte for solid-state micro-supercapacitors
Joule ( IF 39.8 ) Pub Date : 2021-07-23 , DOI: 10.1016/j.joule.2021.07.003
Christopher Choi 1 , Kevin Robert 2, 3 , Grace Whang 1 , Pascal Roussel 4 , Christophe Lethien 2, 3, 5 , Bruce Dunn 1
Affiliation  

Electrochemical energy storage (EES) devices that provide high power and energy for micropower systems are considered to be essential for developing micro/nano electronics such as nanorobotics, environmental sensors, and connected smart electronics. One promising research direction in this field has been to develop on-chip EES devices whose length scales integrate with those of miniaturized electronic devices. In the work described here, we provide the first report of a hydroxide-ion-conducting solid electrolyte that can be patterned using standard lithography. By combining a negative photoresist with a polymerizable ionic liquid, we obtain a thermally and dimensionally stable, hydroxide-ion-conducting solid electrolyte with a conductivity of 10 mS cm−1. Patterning the solid electrolyte directly on interdigitated vanadium nitride (VN) electrodes enables a scalable fabrication approach for producing high-resolution, solid-state VN micro-supercapacitors (MSC) in both single and multiple devices.



中文翻译:

用于固态微型超级电容器的可光图案化氢氧离子电解质

为微功率系统提供高功率和能量的电化学储能 (EES) 设备被认为对于开发微/纳米电子产品(如纳米机器人、环境传感器和连接的智能电子产品)至关重要。该领域的一个有前途的研究方向是开发片上 EES 设备,其长度尺度与小型化电子设备的长度尺度相结合。在这里描述的工作中,我们提供了可以使用标准光刻进行图案化的氢氧离子导电固体电解质的第一份报告。通过将负性光刻胶与可聚合离子液体相结合,我们获得了一种热和尺寸稳定的氢氧离子导电固体电解质,其电导率为 10 mS cm -1. 直接在叉指式氮化钒 (VN) 电极上对固体电解质进行图案化,可以采用可扩展的制造方法,在单个和多个器件中生产高分辨率的固态 VN 微型超级电容器 (MSC)。

更新日期:2021-09-15
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