Based on plasma fluid theory, a one-dimensional fluid model on capacitive radio frequency argon discharges at low pressure is established to study effects of the discharge parameters on the ionization in the discharges. The model can include the ground state excitation and is solved numerically by a finite difference method for the cases of including and without ground state excitation. The numerical results are compared and indicate that the ground state excitation is significant and can not be ignored in the electron energy equation in the model. Furthermore, for the steady state of the discharges, some characteristics in the case of including the ground state excitation for different discharge parameters are discussed. The analysis shows that, when the gap between the parallel electrodes increases from 2.1 cm to 2.9 cm, the peak value of the ionization rate decreases slightly; with the neutral gas pressure increasing from 60 mTorr to 140 mTorr, the peak value of the ionization rate increases; the peak value of the ionization rate increases as the peak voltage increasing from 60 V to 140 V. The conclusion can be commendably to understand the ionization dynamics in the discharges.

基于等离子体流体理论，建立了低压下电容射频氩放电的一维流体模型，研究了放电参数对放电电离的影响。该模型可以包括基态激励，并通过有限差分法对包括和不包括基态激励的情况进行数值求解。数值结果比较表明，基态激发是显着的，在模型中的电子能量方程中是不可忽视的。此外，对于放电的稳态，讨论了在包括不同放电参数的基态激励的情况下的一些特性。分析表明，当平行电极之间的间隙从 2.1 cm 增加到 2.9 cm 时，电离率峰值略有下降；随着中性气体压力从60 mTorr增加到140 mTorr，电离率峰值增加；电离率的峰值随着峰值电压从 60 V 增加到 140 V 而增加。该结论对于理解放电中的电离动力学是值得称赞的。