Screen printing has various industrial applications owing to its simple process and low production cost. With advancement in electronic devices, the demand for fine electrode patterns is gradually increasing. In this study, a novel method for fabricating a hybrid fine metal mask (HFMM) was developed to enable the screen printing of fine electrode patterns. The HFMM was designed to combine the advantages of the conventional screen mask and metal stencils; it was fabricated through photolithography and the electroforming process. The HFMM comprised three parts: a stencil, a bridge, and an anti-sticking feature. A conductive ink, which was passed through the stencil feature, was deposited on the substrate and the bridge feature helped increase the mechanical rigidity of the HFMM. The anti-sticking feature was fabricated for the easy separation of the HFMM from the substrate during the printing process. In this study, the printing feasibility of HFMM to the screen printing process was tested to fabricate fine electrodes with a line width of approximately 10 μm, and the printing and electrical properties of the electrodes were evaluated. The screen printing process with HFMM could be applied to fabricate various functional electrodes, such as stretchable and transparent electrodes.

丝网印刷因其工艺简单、生产成本低而具有多种工业应用。随着电子设备的进步，对精细电极图案的需求逐渐增加。在这项研究中，开发了一种制造混合精细金属掩模 (HFMM) 的新方法，以实现精细电极图案的丝网印刷。HFMM 旨在结合传统丝网掩模和金属模板的优点；它是通过光刻和电铸工艺制造的。HFMM 由三部分组成：模板、桥接和防粘功能。通过模板特征的导电油墨沉积在基板上，桥特征有助于增加 HFMM 的机械刚度。防粘功能的制造是为了在打印过程中将 HFMM 与基板轻松分离。在这项研究中，测试了 HFMM 在丝网印刷工艺中的印刷可行性，以制造线宽约为 10 μm 的精细电极，并评估电极的印刷和电学性能。HFMM 的丝网印刷工艺可用于制造各种功能电极，如可拉伸和透明电极。