Accurate and fast velocity feedback signal is essential for the velocity control of ultrasonic motors (USMs). However, the low operating velocity of USMs results in a long velocity detection dead time (VDDT) of incremental encoders, which seriously restricts the dynamic control performance of USMs. Therefore, this article presents a super-resolution velocity control (SRVC) scheme based on the velocity reconstruction for the USM. First, the mathematical model of the USM is derived from the mechanical characteristics and the electromechanical coupling characteristics. Then, the velocity reconstruction method is proposed by combining the model estimated velocity and the encoder measured velocity. The closed-loop control scheme using the reconstructed velocity is implemented by a self-designed driving circuit. Experimental results show the velocity reconstruction method not only can break through the limitation of the encoder resolution to reduce the VDDT but also has a high-velocity accuracy. Furthermore, compared with the existing encoder-based control scheme, the proposed SRVC scheme has a faster velocity response under different loads.

中文翻译：

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超声波马达的超分辨速度重建与控制。

准确快速的速度反馈信号对于超声波马达 (USM) 的速度控制至关重要。然而，USM 的低运行速度导致增量式编码器的速度检测死区（VDDT）较长，严重制约了 USM 的动态控制性能。因此，本文提出了一种基于 USM 速度重建的超分辨率速度控制 (SRVC) 方案。首先，从机械特性和机电耦合特性推导出USM的数学模型。然后，结合模型估计速度和编码器测量速度提出了速度重建方法。使用重构速度的闭环控制方案由自行设计的驱动电路实现。实验结果表明，该速度重建方法不仅可以突破编码器分辨率的限制，降低VDDT，而且具有较高的速度精度。此外，与现有的基于编码器的控制方案相比，所提出的 SRVC 方案在不同负载下具有更快的速度响应。